Argon metastables in HiPIMS: time-resolved tunable diode-laser diagnostics
نویسندگان
چکیده
منابع مشابه
Argon metastables in HiPIMS: time-resolved tunable diode-laser diagnostics
Time resolved Tunable Diode-Laser Absorption Spectroscopy (TD-LAS) measurements were performed on the argon metastable (Ar) level 3s3p(P°3/2)4s excited at 801.478 nm, in the dense plasma region in front of the magnetron target in a high power impulse magnetron sputtering (HiPIMS) discharge. From the Doppler profile the evolution of the temperature and density were derived during the pulse as we...
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ژورنال
عنوان ژورنال: Plasma Sources Science and Technology
سال: 2012
ISSN: 0963-0252,1361-6595
DOI: 10.1088/0963-0252/21/2/025010